# Calib_XY

Name: WaferCameraCalib_ResultMatrix
Describe: 结果矩阵
Type: Text
LowerLimit: -1000000
UpperLimit: 1000000
Unit: um
Value:
{"Val0":11.672435574098039,"Val1":0.3897358500838795,"Val2":-1.9729889593948697,"Val3":-0.41464921533128873,"Val4":11.568218816363789,"Val5":4.017132694087301}


